The refractive index and extinction coefficient of PECVD silicon nitride thin-films measured by Ellipsometry.
Silicon Nitride Memberance
Photonics and Laser Engineering (PLE) @ Bangor
Prof Zengbo Wang Research Team at Bangor University
Prof Zengbo Wang Research Team at Bangor University
The refractive index and extinction coefficient of PECVD silicon nitride thin-films measured by Ellipsometry.