- Yu-Huan Liu
- Yuan-Yuan Zhao
- Feng Jin
- Xian-Zi Dong*
- Mei-Ling Zheng*
- Zhen-Sheng Zhao
- Xuan-Ming Duan*
Abstract
The emerging demand for device miniaturization and integration prompts the patterning technique of micronano-cross-scale structures as an urgent desire. Lithography, as a sufficient patterning technique, has been playing an important role in achieving functional micronanoscale structures for decades. As a promising alternative, we have proposed and demonstrated the maskless optical projection nanolithography (MLOP-NL) technique for efficient cross-scale patterning. A minimum feature size of 32 nm, which is λ/12 super resolution breaking the optical diffraction limit, has been achieved by a single exposure. Furthermore, multiscale two-dimensional micronano-hybrid structures with the size over hundreds of micrometers and the precision at tens of nanometers have been fabricated by simply controlling the exposure conditions. The proposed MLOP-NL technique provides a powerful tool for achieving cross-scale patterning with both large-scale and precise configuration with high efficiency, which can be potentially used in the fabrication of multiscale integrated microsystems.
Cite this: Nano Lett. 2021, 21, 9, 3915–3921Publication Date:May 3, 2021https://doi.org/10.1021/acs.nanolett.1c00559