{"id":1122,"date":"2021-06-26T22:16:55","date_gmt":"2021-06-26T21:16:55","guid":{"rendered":"http:\/\/laserphotonics.uk\/?p=1122"},"modified":"2021-06-26T22:17:08","modified_gmt":"2021-06-26T21:17:08","slug":"%ce%bb-12-super-resolution-achieved-in-maskless-optical-projection-nanolithography-for-efficient-cross-scale-patterning","status":"publish","type":"post","link":"https:\/\/laserphotonics.uk\/?p=1122","title":{"rendered":"\u03bb\/12 Super Resolution Achieved in Maskless Optical Projection Nanolithography for Efficient Cross-Scale Patterning"},"content":{"rendered":"\n<h1><\/h1>\n\n\n\n<ul><li>Yu-Huan Liu<\/li><li>Yuan-Yuan Zhao<\/li><li>Feng Jin<\/li><li>Xian-Zi Dong<strong>*<\/strong><\/li><li>Mei-Ling Zheng<strong>*<\/strong><\/li><li>Zhen-Sheng Zhao<\/li><li>Xuan-Ming Duan<strong>*<\/strong><\/li><\/ul>\n\n\n\n<h2 id=\"Abstract\">Abstract<\/h2>\n\n\n\n<figure class=\"wp-block-image\"><img src=\"https:\/\/pubs.acs.org\/na101\/home\/literatum\/publisher\/achs\/journals\/content\/nalefd\/2021\/nalefd.2021.21.issue-9\/acs.nanolett.1c00559\/20210505\/images\/medium\/nl1c00559_0006.gif\" alt=\"Abstract Image\"\/><\/figure>\n\n\n\n<p>The emerging demand for device miniaturization and integration prompts the patterning technique of micronano-cross-scale structures as an urgent desire. Lithography, as a sufficient patterning technique, has been playing an important role in achieving functional micronanoscale structures for decades. As a promising alternative, we have proposed and demonstrated the maskless optical projection nanolithography (MLOP-NL) technique for efficient cross-scale patterning. A minimum feature size of 32 nm, which is \u03bb\/12 super resolution breaking the optical diffraction limit, has been achieved by a single exposure. Furthermore, multiscale two-dimensional micronano-hybrid structures with the size over hundreds of micrometers and the precision at tens of nanometers have been fabricated by simply controlling the exposure conditions. The proposed MLOP-NL technique provides a powerful tool for achieving cross-scale patterning with both large-scale and precise configuration with high efficiency, which can be potentially used in the fabrication of multiscale integrated microsystems.<\/p>\n\n\n\n<p><a href=\"https:\/\/pubs.acs.org\/action\/showCitFormats?doi=10.1021%2Facs.nanolett.1c00559&amp;href=\/doi\/10.1021%2Facs.nanolett.1c00559\"><strong>Cite this:&nbsp;<\/strong><\/a><em>Nano Lett.<\/em>&nbsp;2021, 21, 9, 3915\u20133921Publication Date:May 3, 2021<a href=\"https:\/\/doi.org\/10.1021\/acs.nanolett.1c00559\">https:\/\/doi.org\/10.1021\/acs.nanolett.1c00559<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Yu-Huan Liu Yuan-Yuan Zhao Feng Jin Xian-Zi Dong* Mei-Ling Zheng* Zhen-Sheng Zhao Xuan-Ming Duan* Abstract The emerging demand for device miniaturization and integration prompts the patterning technique of micronano-cross-scale structures as an urgent desire. Lithography, as a sufficient patterning technique, has been playing an important role in achieving functional micronanoscale structures for decades. As a [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[1,15],"tags":[],"_links":{"self":[{"href":"https:\/\/laserphotonics.uk\/index.php?rest_route=\/wp\/v2\/posts\/1122"}],"collection":[{"href":"https:\/\/laserphotonics.uk\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/laserphotonics.uk\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/laserphotonics.uk\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/laserphotonics.uk\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1122"}],"version-history":[{"count":1,"href":"https:\/\/laserphotonics.uk\/index.php?rest_route=\/wp\/v2\/posts\/1122\/revisions"}],"predecessor-version":[{"id":1123,"href":"https:\/\/laserphotonics.uk\/index.php?rest_route=\/wp\/v2\/posts\/1122\/revisions\/1123"}],"wp:attachment":[{"href":"https:\/\/laserphotonics.uk\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1122"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/laserphotonics.uk\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1122"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/laserphotonics.uk\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1122"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}